Multi-Wafers

Multi-Wafers

For the vertical-gradient freeze (VGF) process, we supply all carbon-based components in a variety of types and material variations. Continual improvement of the components and reduction of the process costs can be achieved with Schunk's help.

You benefit from these advantages:

  • High-temperature cleaning of the materials used
  • Boron and phosphorous residual contamination in the single-digit ppb range
  • CVD ß-SiC coating of the top plate to increase the degree of filling
  • Reduction of particle release thanks to CFC insulation lamination options