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For the vertical-gradient freeze (VGF) process, we supply all carbon-based components in a variety of types and material variations. Continual improvement of the components and reduction of the process costs can be achieved with Schunk's help.
You benefit from these advantages:
- High-temperature cleaning of the materials used
- Boron and phosphorous residual contamination in the single-digit ppb range
- CVD ß-SiC coating of the top plate to increase the degree of filling
- Reduction of particle release thanks to CFC insulation lamination options